Исследование ориентационной зависимости эмиссии Оже-электронов с поверхности различных материалов методами ионной и электронной Оже спектроскопии

Аннотация

Subjects of research: single crystals of refractory metals Tungsten and Molybdenum, nonferrous metal - Aluminium and semiconductor -Silicon. Purpose of work: Investigation of the dependence of electron emission on orientation and azimuthal angle at electron and ionic bombardment. Comparative research of Auger spectra obtained at the bombardment of solid by electron and ionic beam. Methods of research: Auger electron spectroscopy and Auger ion spectroscopy. The results obtained and their novelty: change of impurity elements peak in Auger spectrum of Mo and W single crystals at the bombardment under different incident and azimuthal angles. Comparative investigation of Auger spectra of W, Al, Si single crystals at electron and ionic bombardment. Similarity of the data obtained from experimental Auger spectra and calculated data. Practical value: application of the scientific-practical recommendation from research works helps to improve quantity of the products of metallurgical and cable works of our republic and can be used at choice of materials in technology of electron and radio technique. Degree of embed and economic efficiency: the results of scientific work are applied in the electron techniques and in manufacturing of products and checking their chemical composition in metallurgical and cable works of Uzbekistan. Field of application: metallurgical and cable works, research institutes and high education institutes.