Methods For Generation Of Cluster Particles Of Different Stochiometry

Аннотация

The main purpose from this paper, in semiconductor technology silicon oxide is to study notable of the surface and catalysis process. As a result, cluster fragmentation processes, we obtained information about the emission of the clusters and the chemical and physical properties of the clusters. We found during the study that oxide clusters are heterogeneous clusters. In heterogeneous clusters, the bonds in the main chain are different from the bonds in the side chain, as in organic polymers. We tried to prove on the basis of the analysis of experimental data that the formation, excitation and molecular decomposition of Si O H - (k = 1-3) cluster ions are based n 2n + 1 k on the model of the combinatorial synthesis mechanism. KEYWORDS Vibrationally,Nanoelectronics,Microanalyzer,Hydrogenated. INTRODUCTION spectra, kinetic energy spectra, and the distribution of internal energies of clusters. Investigation of the The sputtering of targets by beams of accelerated processes of cluster decay makes it possible to primary ions is one of the most productive methods obtain information both on the emission of clusters for generating cluster particles is the sputtering of and on the chemical and physical properties of targets by beams of accelerated primary ions. It is these clusters. Physical and chemical properties of a known that some of the sputtered particles cluster, varying from the properties of atoms to the correspond to cluster ions. Clusters are formed in properties of a solid and depending on the size and vibrationally excited states and decay on their way structure of the cluster, can serve as a basis for the from the target to the detector [2]. The discovery of synthesis of crystals with unique properties that fragmentation of sputtered clusters (Standing's promising for solving urgent problems of modern work) has significantly complicated the nanotechnology [3]. Recently studies, considerable understanding of the cluster emission mechanism, attention is paid to clusters of metal oxides, which since their decay affects the measured mass play an essential role in modern technology - micro- The US A Journals Volume 02 Issue 12-2020 145 The American Journal of Applied Sciences IMPACT FACTOR (ISSN – 2689-0992) 2020: 5. 276 Published: December 31, 2020 | Pages: 145-150 Doi: https://doi.org/10.37547/tajas/Volume02Issue12-22 OCLC - 1121105553 and nanoelectronics, surface chemistry, catalysis EXPERIMENTAL processes, as well as the search for methods of their We used the unique capabilities of an ion synthesis and study of fundamental properties. The microanalyzer with double focusing and reverse study of silicon oxide, which plays an important role geometry of Niro - Johnson type to study the in semiconductor technology, catalysis, and surface formation and fundamental properties of stable chemistry, is especially important. It should also be hydrogenated silicon oxide clusters (Me O H )  or noted that oxides are heterogeneous clusters, and n m x (MeO ) ·nOH Fig.1.[9-10]. The clusters will be in a heterogeneous cluster, in the main chain the 2 synthesized by ion sputtering of the silicon surface bonds are different from those in the branches, as with oxygen or xenon ions while simultaneously in organic polymers. In gases, the time between exposing the surface to the atmosphere of water collisions of molecules under normal conditions of molecules. The dissociation of Н О upon interaction 10-10 s is much longer than the collision time (10-12- 2 with an active oxidized silicon surface with the 10-13 s), therefore the reaction act can be formation of atomic hydrogen will make it possible considered as a result of an isolated pair collision. to synthesize silicon oxide clusters and hydrogen Such collisions can lead to a change in the number atoms in the ion impact zone and generate stable of particles with an energy exceeding the activation energy of the reaction E, and, accordingly, to a cluster configurations (Me n O m H x )  or (MeO 2 )nOH. violation of the Maxwell-Boltzmann distribution of The only property of sputtered cluster particles - to particles over the energies of their relative motion experience a monomolecular decomposition and internal degrees of freedom. Equilibrium reaction in the gas phase - will make it possible to reactions continue relatively slowly, the Maxwell- refine the specific heat, flight times and lifetimes, Boltzmann distribution is practically preserved, and and the fragmentation reaction rates for such the reaction rate can be calculated within the decays, as well as to obtain on their basis such framework of the theory of an activated complex. It information about the fundamental properties of has long been known from thermochemical studies (Me n O m H x )  or (MeO 2 ) clusters nOH  as kinetic that during the sublimation of solid silicon energies of fragmentation ions and activation monoxide or silica, the gas phase contains energies of decays depending on the number of abundant